JPH0485726U - - Google Patents
Info
- Publication number
- JPH0485726U JPH0485726U JP12660890U JP12660890U JPH0485726U JP H0485726 U JPH0485726 U JP H0485726U JP 12660890 U JP12660890 U JP 12660890U JP 12660890 U JP12660890 U JP 12660890U JP H0485726 U JPH0485726 U JP H0485726U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- reduced diameter
- diameter section
- handler
- outer diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990126608U JP2536994Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体製造装置のボート搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990126608U JP2536994Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体製造装置のボート搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0485726U true JPH0485726U (en]) | 1992-07-24 |
| JP2536994Y2 JP2536994Y2 (ja) | 1997-05-28 |
Family
ID=31874153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990126608U Expired - Lifetime JP2536994Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体製造装置のボート搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2536994Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6317521A (ja) * | 1986-07-09 | 1988-01-25 | Kokusai Electric Co Ltd | ウエ−ハボ−トの搬送方法 |
-
1990
- 1990-11-30 JP JP1990126608U patent/JP2536994Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6317521A (ja) * | 1986-07-09 | 1988-01-25 | Kokusai Electric Co Ltd | ウエ−ハボ−トの搬送方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2536994Y2 (ja) | 1997-05-28 |
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